Field-Effect Passivation of Lossy Interfaces in High-Resistivity RF Silicon Substrates

Rack, Martin;Nyssens, Lucas;Nabet, Massinissa;Lederer, Dimitri;Raskin, Jean-Pierre
(2021) 2021 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EuroSOI-ULIS) — Location: Caen, France (2021.September.1AD)

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Rack, M., Nyssens, L., Nabet, M., Lederer, D., & Raskin, J.-P. (2021). Field-Effect Passivation of Lossy Interfaces in High-Resistivity RF Silicon Substrates. EuroSOI-ULIS 2021 Proceedings, p. 130-133. https://doi.org/10.1109/eurosoi-ulis53016.2021.9560697