Macro-Modeling Library in Simscape for MEMS Pressure Sensors Based on Energy-Flow Paradigm

Delhaye, Thibault;Ge, C.;Francis, Laurent;Flandre, Denis;Cretu, E.
(2019) Design, Test, Integration & Packaging of MEMS/MOEMS — Location: Paris (France) (12.May.2019)

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Authors
  • Delhaye, ThibaultUCLouvain
    Author
  • Ge, C.ECE, Vancouver, Canada
    Author
  • Francis, Laurentorcid-logoUCLouvain
    Author
  • Flandre, DenisUCLouvain
    Author
  • Cretu, E.ECE, Vancouver, Canada
    Author
Abstract
. Multiphysics interactions and non-linearity lead to a need of FEA softwares like Comsol, Coventors, Ansys,… • FEA softwares need powerful processors and a lot of time of computation • Reduced Order Models are a good alternative to accelerate the computations under some well chosen assumptions. • Energy flow modeling is a good way to implement such ROM, allowing to build a library of independent and acausal components that can be directly interfaced with electronic readout circuits. • MEMS Pressure Sensing • Energy Flow Modeling • Results
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Delhaye, T., Ge, C., Francis, L., Flandre, D., & Cretu, E. (2019). Macro-Modeling Library in Simscape for MEMS Pressure Sensors Based on Energy-Flow Paradigm. Proceedings of the conference Design, Test, Integration & Packaging of MEMS/MOEMS. Published. Design, Test, Integration & Packaging of MEMS/MOEMS, Paris (France). https://doi.org/10.1109/DTIP.2019.8752962