Extensive Electrical Characterization Methodology of Advanced MOSFETs Towards Analog and RF Applications

Kilchytska, Valeriya;Makovejev, Sergej;Esfeh, Babak Kazemi;Nyssens, Lucas;Flandre, Denis;et.al.
(2021) I E E E Journal of the Electron Devices Society — Vol. 9, p. 500-510 (2021)

Files

ExtensiveElectricalCharacterizationmethodologyofAdvancedMOSFETsTowardsAnalogandRFApplications.pdf
  • Open Access
  • Adobe PDF
  • 2.6 MB

Details

Authors
  • Author
  • Makovejev, SergejIncize, 1348 Louvan-la-Neuve, Belgium
    Author
  • Esfeh, Babak KazemiSense and Actuate Technologies Department, Imec, 3001 Leuven, Belgium
    Author
  • Nyssens, LucasUCLouvain
    Author
  • Halder, ArkaUCLouvain
    Author
  • Author
  • Author
Show more
Abstract
This review paper assesses the main approaches in the electrical characterization of advanced MOSFETs towards their future analog and RF applications. Those approaches are shown to be different from the traditionally used ones for the assessment of the device perspectives for digital applications. Based on the original research realized by our group over the last years, advantages and necessity of those techniques will be demonstrated on different study cases of various advanced MOSFETs, such as Fully Depleted Silicon-on-Insulator (FDSOI), FinFETs and NanoWires (NW) in a wide temperature range (from cryogenic, 4 K up to 250◦C). A wide frequency band characterization (from DC up to hundred GHz range) will be positioned as a key element enabling a fair device assessment towards analog and RF applications. Importance of the “extrinsic” parasitic elements in the advanced devices is enormous, sometimes even dominating the device performance. Therefrom arises the need for a proper separate extraction and discussion of “intrinsic” versus “extrinsic” parameters.
Affiliations

Citations

Kilchytska, V., Makovejev, S., Esfeh, B. K., Nyssens, L., Halder, A., Raskin, J.-P., & Flandre, D. (2021). Extensive Electrical Characterization Methodology of Advanced MOSFETs Towards Analog and RF Applications. I E E E Journal of the Electron Devices Society, 9, 500-510. https://doi.org/10.1109/JEDS.2021.3057798 (Original work published 2021)