Control of sputtered VO2 thin film grain size through O2 concentration

Bidoul, Noémie;Huet, Benjamin;Ureña-Begara, Ferran;Raskin, Jean-Pierre;Flandre, Denis
(2022) Micro and Nano Engineering conference (MNE) EUROSENSORS 2022 — Location: Leuven, Belgium (19.September.2022)

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Bidoul, N., Huet, B., Ureña-Begara, F., Raskin, J.-P., & Flandre, D. (2022). Control of sputtered VO2 thin film grain size through O2 concentration. Micro and Nano Engineering conference (MNE) EUROSENSORS 2022, Leuven, Belgium. https://hdl.handle.net/2078.5/103805