Structural and nanomechanical properties of porous silicon: Cheap substrate for CMOS process industry

Belaroussi, Yasmina;Scheen, Gilles;Saadi, Abdelhalim A.;Taibi, Abdelkader;Raskin, Jean-Pierre;et.al.
(2020) Surface and Interface Analysis — Vol. 52, n° 12, p. 1055-1060 (2020)

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  • Belaroussi, Yasminaorcid-logoCentre de Développement des Technologies Avancées, Alger, Algeria
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  • Saadi, Abdelhalim A.NXP Semiconductors, Toulouse, France
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  • Taibi, AbdelkaderCentre de Développement des Technologies Avancées, Alger, Algeria
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Belaroussi, Y., Scheen, G., Saadi, A. A., Taibi, A., Maafri, D., Nysten, B., Gabouze, N., & Raskin, J.-P. (2020). Structural and nanomechanical properties of porous silicon: Cheap substrate for CMOS process industry. Surface and Interface Analysis, 52(12), 1055-1060. https://doi.org/10.1002/sia.6885 (Original work published 2020)