Development Of High Resistivity FD-SOI Substrates for mmWave Applications

Bertrand, Isabelle;Flatresse, Philippe;Besnard, Guillaume;Bethoux, Jean-Marc;Allibert, Frederic;et.al.
(2022) ECS Transactions — Vol. 108, n° 5, p. 31-45 (2022)

Files

Bertrand_HRFD-SOI_ECS_FINAL.pdf
  • Open Access
  • Adobe PDF
  • 2.6 MB

Details

Authors
Show more
Affiliations

Citations

Bertrand, I., Flatresse, P., Besnard, G., Bethoux, J.-M., Chalupa, Z., Plantier, C., Rack, M., Nabet, M., Raskin, J.-P., & Allibert, F. (2022). Development Of High Resistivity FD-SOI Substrates for mmWave Applications. ECS Transactions, 108(5), 31-45. https://doi.org/10.1149/10805.0031ecst (Original work published 2022)