Novel parametric-effect MEMS amplifiers/transducers

Brown, A.;Raskin, Jean-Pierre;Khuri-Yakub, B. T.;Rebeiz, G. M.
(2000) Solid-State Sensor and Actuator Workshop — Location: Hilton Head Island, South Carolina (USA) (4.June.2000)

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(en) A parametric effect amplifier has been built at 200 kHz (input) and 1.84 MHz (output) using a MEMS time-varying capacitor. The capacitor is composed of a thin low stress metallized silicon-nitride diaphragm and is pumped by a large signal voltage at 1.64 MHz. This results in a large change in the capacitance, and parametric amplification of an input signal at 200 kHz. To our knowledge, this device is the first-ever mechanical up-converter parametric-effect amplifier, with an up-conversion ratio of 9:1.
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Brown, A., Raskin, J.-P., Khuri-Yakub, B. T., & Rebeiz, G. M. (2000). Novel parametric-effect MEMS amplifiers/transducers. Solid-State Sensor and Actuator Workshop, Hilton Head Island, South Carolina (USA). https://hdl.handle.net/2078.5/228368