Effect of Heat Sink in Back-End of Line on Self-Heating in 22 nm FDSOI MOSFETs

Halder, Arka;Nyssens, Lucas;Rack, Martin;Raskin, Jean-Pierre;Kilchytska, Valeriya
(2020) 2020 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS) — Location: Caen, France (1.September.2020)

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Halder, A., Nyssens, L., Rack, M., Raskin, J.-P., & Kilchytska, V. (2020). Effect of Heat Sink in Back-End of Line on Self-Heating in 22 nm FDSOI MOSFETs. Proceedings, p. 1-4. https://doi.org/10.1109/eurosoi-ulis49407.2020.9365293