Silicon on Insulator (SOI)CMOS is widely regarded as a very attractive and mature technology for the realization of low-voltage low-power digital, analog and microwave circuits, as well as sensors and MEMS. The present chapter firstly reviews the tremendous process, device and circuits advantages of SOI technology with regards to conventional bulk Si CMOS, in view of showing how they can be combined to integrate high-performance intelligent/ smart micro-systems.Secondly, two cases of study demonstrate theoretical devlopments and experimental results targeting the implementation of such smart systems featuring on one hand, power minimization fir e.g. wireless operation and/or biomedical applications in hostile environments.
Flandre, D. (2004). SOI Technology: A viable alternative to bulk CMOS. In Valle, Maurizio (ed.) (ed.), Smart Adaptive Systems on Silicon (p. p. 49-64). Kluwer Academic. https://hdl.handle.net/2078.5/99845