Insights into the yield enhancement and ion emission process in metal-assisted SIMS

Nittler, L.;Delcorte, Arnaud;Bertrand, Patrick;Migeon, H.-N.
(2013) Surface and Interface Analysis — Vol. 45, n° 1, p. 18-21 (2013)

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Authors
  • Nittler, L.CRP Lippmann Belvaux Luxembourg
    Author
  • Delcorte, ArnaudUCLouvain
    Author
  • Bertrand, PatrickUCLouvain
    Author
  • Migeon, H.-N.UCLouvain
    Author
Abstract
Although nowadays the use of cluster ion sources seems to enhance the secondary ion emission for nearly all materials, the technique of metal-assisted SIMS can still give further insights in the secondary ion emission process. In this study, the metallization for static SIMS analysis was performed in situ. The combination of a detailed morphology study by SEM, TEM and the secondary yield enhancements in time-of-flight SIMS allows to develop a model explaining the secondary yield enhancement in metal-assisted SIMS. Copyright © 2012 John Wiley & Sons, Ltd. Copyright © 2012 John Wiley & Sons, Ltd.
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Nittler, L., Delcorte, A., Bertrand, P., & Migeon, H.-N. (2013). Insights into the yield enhancement and ion emission process in metal-assisted SIMS. Surface and Interface Analysis, 45(1), 18-21. https://doi.org/10.1002/sia.5045 (Original work published 2013)