Multipurpose on-chip nanomechanical laboratory for testing thin films

Pardoen, Thomas;Raskin, Jean-Pierre;Coulombier, Michaël;Gravier, Sébastien;Houri, Samer;et.al.
(2007) 2007 Materials Research Society (MRS) Fall Meeting — Location: Boston, MA, USA (26.November.2007)

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Pardoen, T., Raskin, J.-P., Coulombier, M., Gravier, S., André, N., Safi, A., Gets, T., De Longueville, V., Sobieski, S., & Houri, S. (2007). Multipurpose on-chip nanomechanical laboratory for testing thin films. Proceedings of the 2007 Materials Research Society (MRS) Fall Meeting, p. paper # DD1.3. https://hdl.handle.net/2078.5/272264