Fabrication and modeling of 3-D self-assembled SOI MEMS controlled by thermal and plastic strains
(2005) IEEE MEMS 2005 — Location: Miami, Florida, USA (29.January.2005)
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Iker, F., André, N., Proost, J., Pardoen, T., & Raskin, J.-P. (2005). Fabrication and modeling of 3-D self-assembled SOI MEMS controlled by thermal and plastic strains. Proceedings of MEMS 2005, p. 459-462. https://hdl.handle.net/2078.5/272263