SOI CMOS and MEMS for single-chip high-temperature microsystems

Flandre, Denis;Laconte, Jean;Levacq, David;Afzalian, Aryan;Raskin, Jean-Pierre;et.al.
(2005) 2005 International Conference on High Temperature Electronics (HITEN 2005) — Location: Paris (France) (6.September.2005)

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Flandre, D., Laconte, J., Levacq, D., Afzalian, A., Rue, B., Renaux, C., Iker, F., Olbrechts, B., André, N., & Raskin, J.-P. (2005). SOI CMOS and MEMS for single-chip high-temperature microsystems. Proceedings of the 2005 International Conference on High Temperature Electronics (HITEN 2005), p. Paper n°1. https://hdl.handle.net/2078.5/272259