Fabrication and modeling of 3-D self-assembled SOI MEMS using plasticity features
(2005) 18th IEEE International Conference on MicroElectroMechanical Systems - MEMS 2005 — Location: Miami, Floride, USA (30.January.2005)
Files
No attached file found for this publication.
Details
- Authors
- Affiliations
Citations
Iker, F., André, N., Proost, J., Pardoen, T., & Raskin, J.-P. (2005). Fabrication and modeling of 3-D self-assembled SOI MEMS using plasticity features. Proceedings, p. 459-462. https://hdl.handle.net/2078.5/272256