SOI co-integrated microsensors
(2007) 7th MEMUNITY - The MEMS Test Community - Workshop — Location: Eindhoven, The Netherlands (23.October.2007)
Files
No attached file found for this publication.
Details
- Authors
- Affiliations
Citations
Olbrechts, B., André, N., Rue, B., Flandre, D., & Raskin, J.-P. (2007). SOI co-integrated microsensors. Proceedings of the 7th MEMUNITY - The MEMS Test Community - Workshop, Paper 10. https://hdl.handle.net/2078.5/272255