New concept of multipurpose on-chip nanomechanical laboratory

Coulombier, Michaël;Gravier, Sébastien;Pardoen, Thomas;Fabrègue, Damien;Raskin, Jean-Pierre;et.al.
(2007) 1st International Congress and Exhibition on Microreliability and Nanoreliability in Key Technology Applications - MicroNanoReliability 2007 — Location: Berlin, Germany (2.September.2007)

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Coulombier, M., Gravier, S., Pardoen, T., Fabrègue, D., André, N., Houri, S., & Raskin, J.-P. (2007). New concept of multipurpose on-chip nanomechanical laboratory. Proceedings of the 1st International Congress and Exhibition on Microreliability and Nanoreliability in Key Technology Applications - MicroNanoReliability 2007. Published. 1st International Congress and Exhibition on Microreliability and Nanoreliability in Key Technology Applications - MicroNanoReliability 2007, Berlin, Germany. https://hdl.handle.net/2078.5/272244