New internal stress driven micromachines for measuring the mechanical properties of thin films
(2006) International Symposium on Design, Test, Integration and Packaging of MEMS / MOEMS — Location: Stresa, Lago Maggiore, Italy (24.April.2006)
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Fabrègue, D., André, N., Pardoen, T., Raskin, J.-P., & Coulombier, M. (2006). New internal stress driven micromachines for measuring the mechanical properties of thin films. Proceedings of the DTIP 2006, p. 189-194. https://hdl.handle.net/2078.5/272238