Out-of-plane topography of 3-D surface micromachined micro-sensors
(2008) Materials Science in Semiconductor Processing — n° 2, p. 22-23 (2008)
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André, N., Sobieski, S., Francis, L., & Raskin, J.-P. (2008). Out-of-plane topography of 3-D surface micromachined micro-sensors. Materials Science in Semiconductor Processing, 2, 22-23. https://hdl.handle.net/2078.5/272231 (Original work published 2008)