Messung der 3D-Topographie von Sensoren in Mikrosystemtechnik
(2009) MessTec — n° 01-02, p. 22 (2009)
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André, N., Sobieski, S., Francis, L., & Raskin, J.-P. (2009). Messung der 3D-Topographie von Sensoren in Mikrosystemtechnik. MessTec, 01-02, 22. https://hdl.handle.net/2078.5/272224 (Original work published 2009)