3-D SOI MEMS for sensing applications
(2010) 3ème Colloque du Laboratoire International Associé « Nanotechnologies & Nanosystèmes — Location: Sherbrooke (Canada) (12.July.2010)
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André, N., Raskin, J.-P., & Francis, L. (2010). 3-D SOI MEMS for sensing applications. Proceedings du 3ème Colloque du Laboratoire International Associé « Nanotechnologies & Nanosystèmes, p. 88. https://hdl.handle.net/2078.5/272213