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Abstract
We recently introduced a CMOS-compatible out-of-plane magnetic sensor based on Lorentz force. In the present paper, we analyze the impact of Joule effect on those sensors. At an experimental level, 3-D white light interferometry is used to assert the coupling of thermal, electromagnetic and mechanical effects while, at a simulation level, finite element analysis is performed to correlate device design to experimental data and expand our analysis to optimize new configurations.
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Sobieski, S., André, N., Francis, L., & Raskin, J.-P. (2008). Temperature effect on Lorentz based magnetometer. Proceedings of the European Magnetic Sensors & Actuators Conference - EMSA 2008, p. 138. https://hdl.handle.net/2078.5/272212