Moreno Hagelsieb, L., Pampin, R., Bulteel, O., Olbrechts, B., André, N., Rue, B., Raskin, J.-P., & Flandre, D. (2008). Development of Micro- and Nano- Bio- and Environmental SOI-Sensors. Proceedings of the Workshop on MEMS and Nanotechnology through Science and Applications. Published. Workshop on MEMS and Nanotechnology through Science and Applications, UCL/Louvain-la-Neuve (Belgium). https://hdl.handle.net/2078.5/272209