3-D capacitive MEMS sensors co-integrated with SOI CMOS circuits

André, Nicolas;Rue, Bertrand;Renaux, Christian;Flandre, Denis;Raskin, Jean-Pierre
(2008) Fourth Workshop of the Thematic Network on Silicon on Insulator technology, devices and circuits (EUROSOI 2008) — Location: Tyndall National Institute, Cork (Ireland) (23.January.2008)

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André, N., Rue, B., Renaux, C., Flandre, D., & Raskin, J.-P. (2008). 3-D capacitive MEMS sensors co-integrated with SOI CMOS circuits. Proceedings of the EUROSOI - 2008, Fourth Workshop of the Thematic Network on Silicon on Insulator technology, devices and circuits, 75-76. https://hdl.handle.net/2078.5/272208