Artificial microbeams to sense air flow, temperature or humidity combining MEMS and CMOS technologies
(2008) Sensors and Sensing in Biology and Engineering Conference, October 12 – 16, 2008 — Location: Cetraro (Italy) (12.October.2008)
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André, N., Rue, B., Renaux, C., Raskin, J.-P., & Flandre, D. (2008). Artificial microbeams to sense air flow, temperature or humidity combining MEMS and CMOS technologies. Sensors and Sensing in Biology and Engineering Conference, October 12 – 16, 2008, Cetraro (Italy). https://hdl.handle.net/2078.5/272204