3-D CMOS compatible MEMS sensors and actuators
(2008) Workshop on MEMS and Nanotechnology through Science and Applications — Location: UCL/Louvain-la-Neuve (Belgium) (18.March.2008)
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André, N., Sobieski, S., Renaux, C., Flandre, D., & Raskin, J.-P. (2008). 3-D CMOS compatible MEMS sensors and actuators. proceedings of the Workshop on MEMS and Nanotechnology through Science and Applications. Published. Workshop on MEMS and Nanotechnology through Science and Applications, UCL/Louvain-la-Neuve (Belgium). https://hdl.handle.net/2078.5/272203