The integrated design of a MEMS-based flow-sensor system

André, Nicolas;Francis, Laurent;Raskin, Jean-Pierre;Nachergaele, P.;De Baetselier, E.;et.al.
(2011) Smart System Integration 2011, European Conference & Exhibition on Integration Issues of Miniaturized Systems – MEMS, MOEMS ICs and Electronic Components — Location: Dresden (Germany) (22.March.2011)

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André, N., Francis, L., Raskin, J.-P., Nachergaele, P., Vaassen, J.-M., Civello, J., Cases, S., Paquay, S., & De Baetselier, E. (2011). The integrated design of a MEMS-based flow-sensor system. Proceedings of the Smart System Integration 2011. Published. Smart System Integration 2011, European Conference & Exhibition on Integration Issues of Miniaturized Systems – MEMS, MOEMS ICs and Electronic Components, Dresden (Germany). https://hdl.handle.net/2078.5/272202