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Abstract
We recently introduced a CMOS-compatible out-of-plane magnetic sensor based on Lorentz force. In the present paper, we analyze the impact of Joule effect on those sensors. At an experimental level, 3-D white light interferometry is used to assert the coupling of thermal, electromagnetic and mechanical effects while, at a simulation level, finite element analysis is performed to correlate device design to experimental data and expand our analysis to optimize new configurations.
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Sobieski, S., André, N., Raskin, J.-P., & Francis, L. (2009). Temperature Effect on Lorentz Based Magnetometer. Sensor Letters, 7(3), 456-459. https://doi.org/10.1166/sl.2009.1068 (Original work published 2009)