A silicon-on-insulator (SOI) platform functionalized by atomic layer deposition (ALD) for humidity sensing

André, Nicolas;Pollissard, Guillaume;Couniot, Numa;Gérard, Pierre;Flandre, Denis;et.al.
(2014) International Meeting on New Sensing Technologies and Modelling for Air-Pollution Monitoring — Location: Aveiro (Portugal) (14.October.2014)

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André, N., Pollissard, G., Couniot, N., Gérard, P., Ali, Z. S., Udrea, F., Francis, L., & Flandre, D. (2014). A silicon-on-insulator (SOI) platform functionalized by atomic layer deposition (ALD) for humidity sensing. International Meeting on New Sensing Technologies and Modelling for Air-Pollution Monitoring, Aveiro (Portugal). https://hdl.handle.net/2078.5/272192