Artificial microbeams for sensing air flow, temperature and humidity by combining MEMS and CMOS technologies
(2011) Optical, Acoustic, Magnetic, and Mechanical Sensor Technologies — ISBN: [9781439869758], published
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André, N., Francis, L., Rue, B., Renaux, C., Flandre, D., & Raskin, J.-P. (2011). Artificial microbeams for sensing air flow, temperature and humidity by combining MEMS and CMOS technologies. In Kris Iniewski (ed.), Optical, Acoustic, Magnetic, and Mechanical Sensor Technologies. CRC Press. https://hdl.handle.net/2078.5/272189