Sensors and Sensor Systems for Harsh Environment Applications
(2016) Semiconductor Devices in Harsh Environment — ISBN: [978-1-4987-4380-8], p. 87-109, published
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- This chapter focuses on the development of sensors and sensor systems for harsh environments. Among various applications with high commercial impact, combustion optimisation and emission control in small-scale boilers is considered as an illustrative application which can benefit from the employment of a multimeasur and sensor system able to cope with harsh environment conditions. More specifically, silicon on insulator (SOI) is proposed as common technology platform for the realisation of a diode temperature sensor, a thermal flow sensor, a capacitive humidity sensor, a chemiresistive oxygen sensor, a diode ultraviolet (UV) photosensor, and a non-dispersive-infra-red (NDIR) carbon dioxide sensor. Considerations regarding circuitry, packaging and system integration and testing are also included, along with a detailed analysis of each single sensing device.
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Udrea, F., Li, G., Zeng, Y., André, N., Pollissard, G., Francis, L., Flandre, D., Racz, Z., Gardner, J., Zeeshan, A., Buiu, O., Serban, B. C., Cobianu, C., & Wotherspoon, T. (2016). Sensors and Sensor Systems for Harsh Environment Applications. In Kirsten Weide-Zaage, Malgorzata Chrzanowska-Jeske, Krzysztof Iniewski (ed.), Semiconductor Devices in Harsh Environment (p. p. 87-109). Taylor & francis Group. https://doi.org/10.1201/9781315368948-6