Harsh Environment Water Vapour Sensing Platforms in SOI Technology

André, Nicolas;Pollissard, Guillaume;Couniot, Numa;Gérard, Pierre;Flandre, Denis;et.al.
(2014) CMOS Emerging Technologies Research Symposium — Location: Grenoble (France) (6.July.2014)

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Abstract
Although commercial harsh environment sensors have been developed to operate above 200 °C, such as in industrial process control, automotive, or aerospace, they are still limited in types, technologies, or reliability issues. Our motivation is to develop a low cost, low power and reliable sensor with integrated electronics interface for applications above 200 °C [1-2]. In this paper, we are reporting the performances of a micro-machined gas sensor designed to monitor the water vapour concentration above a methane burner up to 225 °C. The sensor is a Silicon-on-Insulator (SOI) micro-hotplate [3] with an Al2O3 passivated impedimetric transducer. The sensor is hybrid integrated with a SOI readout interface to convert the measured impedance to frequency. Most comparable sensors have a high temperature unstable polysilicon as a heater material and bulk CMOS technology, reliable at maximum 150 °C [4-5].
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André, N., Pollissard, G., Couniot, N., Gérard, P., Ali, Z., Udrea, F., Francis, L., & Flandre, D. (2014). Harsh Environment Water Vapour Sensing Platforms in SOI Technology. CMOS Emerging Technologies Research Symposium, Grenoble (France). https://hdl.handle.net/2078.5/272165