Accurate estimation of Young’s modulus of VO2 thin film integrated on polyimide for high strain studies
(2024) Measuring By Light 2025 — Location: Delft, Pays-Bas (1.April.2025)
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AccurateestimationofYoungsmodulusofVO2thinfilmintegratedonpolyimideforhighstrainstudies.pdf
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- Authors
Roisin, Nicolas 
- Abstract
- VO2 is a promising material that features both an hysteretic phase change near room temperature and interesting properties such as a high gage factor of up to 250 [Inomata & al. 2018]. Values have been reported for polycrystalline VO2 thin film mainly deposited by reactive sputtering to form classical MEMS membrane and measured at low strain. This work presents a 220 nm-thick VO2 thin film integrated on a 3.2 μm-thick and 2.5 mm-wide polyimide membrane. The use of polyimide allows to induce strain up to 1%. This work combines finite element simulations and white-light interferometry measurements of the membrane to study the high-strain properties of the VO2 material. The fabricated samples are used to estimate the Young’s modulus of the film to solve the high uncertainty reported in the literature. Indeed, a wide range of modulus are given in the literature due to the important impact of process parameters on film topology [Sepúlveda & al. 2008 and Carbera & al. 2014].. Fitting the simulation parameters on the experimental data allows to accurately estimate the modulus to 120 GPa for the considered film.
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Citations
Lahaye, L., Roisin, N., Raskin, J.-P., & Flandre, D. (2024). Accurate estimation of Young’s modulus of VO2 thin film integrated on polyimide for high strain studies. Measuring By Light 2025, Delft, Pays-Bas. https://hdl.handle.net/2078.5/270834