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Tang, X., Raskin, J.-P., Jonas, A., Nysten, B., Demoustier, S., Bayot, V., Francis, L., Pampin, R., Moreno Hagelsieb, L., & Flandre, D. (2009). Fabrication of SOI-based nano-biosensors. Proceedings of the 35th International Conference on Micro & Nano Engineering (MNE). Published. 35th International Conference on Micro & Nano Engineering (MNE), Ghent (Belgium). https://hdl.handle.net/2078.5/270329