Cupric Oxide-Coated PCB-based Interdigitated Transducer for Acetone Sensing
(2025) 2025 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) — Location: Split, Croatia (1.June.2025)
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Cupric_Oxide-Coated_PCB-based_Interdigitated_Transducer_for_Acetone_Sensing.pdf
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- Abstract
- In this paper, we report a copper oxide (CuO)-coated gas sensor based on an interdigitated capacitive transducer for the detection of volatile organic compounds (VOCs), especially acetone. The device is built on a printed circuit board (PCB) as a gold-copper interdigitated capacitor (20 fingers, 0.4 mm electrode width, 0.2 mm gap), functionalized with a sputtered CuO sensitive layer, which was selected for its stability, non-toxicity, cost-effectiveness, and durability. Finite element simulations using COMSOL were used to model the capacitance of the fabricated sensor and were validated by analytical estimation. CuO was deposited via DC magnetron sputtering at room temperature. Its structural characterization was carried out by Raman spectroscopy, and SEM demonstrated the successful deposition. Electrical measurements using a vector network analyzer (VNA) assessed the changes in capacitance and resistance versus frequency, both with the sensitive layer and under acetone exposure. The effects of CuO and acetone were observed in terms of the changes in capacitance and resistance.
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Citations
Zardi, N., Shirin, A., Masmoudi, M., Danlée, Y., Tounsi, F., & Flandre, D. (2025). Cupric Oxide-Coated PCB-based Interdigitated Transducer for Acetone Sensing. 2025 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP). Published. 2025 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), Split, Croatia. https://doi.org/10.1109/DTIP66728.2025.11099216 (Original work published 2025)