Low temperature assembly method of microfluidic bio-molecules detection device
(2012) 3rd IEEE International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D 2012) — Location: Tokyo (Japan) (22.May.2012)
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- Abstract
- We developed a microfluidic device for the detection of bio-molecules. The active part of the device is a biofunctionalized interdigitated capacitive sensor. The microsystem consists of a sensor on silicon chip, a microfluidic channel formed by photo-patternable resist and a plastic cover. We implemented a low temperature packaging process to assemble the sensor and prevent the biological material from degradation.
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Citations
Van Loo, S., Stoukatch, S., Axisa, F., Destiné, J., Van Overstraeten, N., Flandre, D., Lefèvre, O., & Mertens, P. (2012). Low temperature assembly method of microfluidic bio-molecules detection device. Proceedings of the 3rd IEEE International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D 2012), 181-184. https://doi.org/10.1109/LTB-3D.2012.6238086