Low temperature assembly method of microfluidic bio-molecules detection device

Van Loo, Stéphanie;Stoukatch, Serguei;Axisa, Fabrice;Destiné, Jacques;Mertens, Pascal;et.al.
(2012) 3rd IEEE International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D 2012) — Location: Tokyo (Japan) (22.May.2012)

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Authors
  • Van Loo, StéphanieEMMI/Microsys
    Author
  • Stoukatch, SergueiEMMI/Microsys
    Author
  • Axisa, FabriceEMMI/Microsys
    Author
  • Destiné, JacquesEMMI/Microsys
    Author
  • Van Overstraeten, NancyUCLouvain
    Author
  • Flandre, DenisUCLouvain
    Author
  • Mertens, PascalEMMI/Microsys
    Author
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Abstract
We developed a microfluidic device for the detection of bio-molecules. The active part of the device is a biofunctionalized interdigitated capacitive sensor. The microsystem consists of a sensor on silicon chip, a microfluidic channel formed by photo-patternable resist and a plastic cover. We implemented a low temperature packaging process to assemble the sensor and prevent the biological material from degradation.
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