Integrated Low-Cost Micro-Sensors for DNA Sensitive Electrical Detection

Pampin, Rémi;Moreno Hagelsieb, Luis;Lobert, Pierre-Emmanuel;Géry, Laurent;Flandre, Denis;et.al.
(2003) ASM Conference on Bio-, Micro-, and Nanosystems — Location: New-York (USA) (7.July.2003)

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  • Pampin, Rémiorcid-logoUCLouvain
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  • Moreno Hagelsieb, LuisUCLouvain
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  • Lobert, Pierre-EmmanuelUCLouvain
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  • Géry, LaurentUCLouvain
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  • Remacle, JoséUCLouvain
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Abstract
The detection of DNA by electrical based methods still faces the challenge of the low amounts of genetic material to be analyzed in order to make the assay useful for biological applications. In this work we present the possibility to detect metal-labeled DNA by measuring a change in electrical parameters, in both low and high frequency ranges. The sensors were made of aluminum electrodes coated with a thin metal oxide, constructed over an oxidized silicon wafer through a low cost CMOS-compatible process. Labeling of the DNA was performed by incorporation of biotinylated nucleotides and reaction with anti-biotin antibodies coupled to gold nanoparticles, whose size was subsequently increased by silver crystal precipitation. For low frequency measurements (below 10 MHz), we fabricated interdigitated micro-arrays covering each an area of 400x400µm2 with electrodes fingers of 1, 2 and 3µm widths and spacing. These arrays allowed us to measure a change in capacitance by a factor between 2 and 30, when DNA solutions were spotted down to 0.2nM. In the high frequency range (GHz order reported for the first time), we designed inductors with similar areas whose resonant frequencies shift by up to 10 GHz for 20nM DNA solutions, introducing the possibility to detect accurately even much smaller concentrations. Those methods of detection thus appear compatible with the requirements of microarray technology and pave the way for further use in biological applications.
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Pampin, R., Moreno Hagelsieb, L., Lobert, P.-E., Géry, L., Raskin, J.-P., Remacle, J., & Flandre, D. (2003). Integrated Low-Cost Micro-Sensors for DNA Sensitive Electrical Detection. Proceedings of the ASM Conference on Bio-, Micro-, and Nanosystems, 25 - Abstract n°16, 2 posters. https://hdl.handle.net/2078.5/254606