Wide frequency tuning range of MEMS resonators through on-wafer uniaxial stress
(2008) 34th International Conference on Micro- and Nano-Engineering - MNE 2008 — Location: Athens (Greece) (15.September.2008)
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Houri, S., Francis, L., & Raskin, J.-P. (2008). Wide frequency tuning range of MEMS resonators through on-wafer uniaxial stress. Proceedings of the 34th International Conference on Micro- and Nano-Engineering - MNE 2008, p. 366 - Paper MEMS3-P15. https://hdl.handle.net/2078.5/253464