Experimental Study of the Effective Mobility in Doped- and Undoped-Channel Triple-Gate FinFET Structures

Rudenko, Tamara;Kilchytska, Valeriya;Collaert, N.;Jurczak, Malgorzata;Flandre, Denis;et.al.
(2007) EUROSOI 2007 — Location: Leuven (Belgium) (24.January.2007)

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  • Rudenko, TamaraLashkaryov Institute of Semiconductor Physics (ISP), Kyiv
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  • Kilchytska, ValeriyaUCLouvain
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  • Collaert, N.IMEC
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  • Jurczak, MalgorzataUkraine National Academy of Science
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  • Flandre, DenisUCLouvain
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Rudenko, T., Kilchytska, V., Collaert, N., Jurczak, M., Nazarov, A., & Flandre, D. (2007). Experimental Study of the Effective Mobility in Doped- and Undoped-Channel Triple-Gate FinFET Structures. Conference proceedings of EUROSOI 2007. EUROSOI 2007, Leuven (Belgium). https://hdl.handle.net/2078.5/253402