SiGe MEMS Accelerometers Combining a Large Bandwidth with a High Capacitive Sensitivity
(2012) 26th European Conference on Solid-State Transducers (Eurosensors 2012) — Location: Krakow (Poland) (9.September.2012)
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Ray Chaudhuri, A., Severi, S., Erismis, M., Francis, L., & Witvrouw, A. (2012). SiGe MEMS Accelerometers Combining a Large Bandwidth with a High Capacitive Sensitivity. Proceedings of the 26th European Conference on Solid-State Transducers (Eurosensors 2012). Published. 26th European Conference on Solid-State Transducers (Eurosensors 2012), Krakow (Poland). https://doi.org/10.1016/j.proeng.2012.09.254