Neutron and gamma radiation effects on MEMS structures

Gkotsis, Petros;Kilchytska, Valeriya;Bhaskar, Umesh Kumar;Militaru, Otilia;Francis, Laurent;et.al.
(2011) Procedia Engineering — Vol. 25, p. 172-175 (2011)

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Abstract
MEMS technology is expected to play a significant role in future space missions provided the effects of radiation on the reliability of MEMS devices is well understood [1]. Radiation induced dielectric charging has been identified as a mechanism which can potentially limit the reliability of electrostatically actuated MEMS devices [2]. The response of piezoresistive and PZT actuated MEMS was also found to change after exposure to different types of radiation [3]. It is however necessary to further investigate the effect of radiation and especially neutrons on the electromechanical properties of various materials that are used in microfabrication [4]. In this work we present results from mechanical and electrical tests on different materials before and after exposure to neutrons radiation.
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Gkotsis, P., Kilchytska, V., Bhaskar, U. K., Militaru, O., Tang, X., Fragkiadakis, C., Kirby, P. B., Raskin, J.-P., Flandre, D., & Francis, L. (2011). Neutron and gamma radiation effects on MEMS structures. Procedia Engineering, 25, 172-175. https://doi.org/10.1016/j.proeng.2011.12.043 (Original work published 2011)