Investigation of salicide processes for thin-film SOI microwave applications
(1997) 8th International Symposium on SOI technology and devices (ECS 1997) — Location: Paris (France) (20.November.1997)
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Chen, J., Colinge, J.-P., Flandre, D., Gillon, R., Raskin, J.-P., & Vanhoenacker-Janvier, D. (1997). Investigation of salicide processes for thin-film SOI microwave applications. Proceedings of the 8th International Symposium on SOI technology and devices (ECS 1997), 98-103. https://hdl.handle.net/2078.5/253245