MEMS filters based on traveling flexural waves
(2010) 2010 IEEE International Frequency Control Symposium (FCS 2010) — Location: Newport Beach (CA/USA) (1.June.2010)
Files
No attached file found for this publication.
Details
- Authors
- Abstract
- This paper introduces MEMS filters based on the use of traveling flexural waves. The underlying concept of these devices draws on an analogy with SAW devices, while replacing the surface elastic wave with a flexural wave on a suspended beam. This is in contrast with traditional flexural MEMS devices whereby all signal processing is done via a resonating element corresponding to a standing flexural wave. As far as the authors are aware this is the first study regarding traveling flexural wave devices and their frequency domain behavior.
- Affiliations
Citations
Houri, S., Raskin, J.-P., & Francis, L. (2010). MEMS filters based on traveling flexural waves. proceedings of the 2010 IEEE International Frequency Control Symposium (FCS 2010), 151-154. https://doi.org/10.1109/FREQ.2010.5556353