An analytical 3D model for short-channel effects in undoped FinFETs

El Hamid, Hamdy Abd;Iniguez, Benjamin;Kilchytska, Valeriya;Flandre, Denis;Ismail, Yehea
(2015) Journal of Computational Electronics — Vol. 14, n° 2, p. 500-505 (2015)

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Authors
  • El Hamid, Hamdy AbdCenter for Nanoelectronics and Devices (CND), Giza/Egypt
    Author
  • Iniguez, BenjaminUniversitat Rovira i Virgili, Tarragona/Spain
    Author
  • Author
  • Author
  • Ismail, YeheaCenter for Nanoelectronics and Devices (CND), Giza/Egypt
    Author
Abstract
An analytical and scalable model for the threshold voltage in FinFETs has been developed by solving the 3-D Poisson equation using appropriate techniques. The model is also based on a physical analysis of the conduction path. The mobile charge term was considered in the 3-D Poisson’s equation to be solved. The threshold voltage is defined as the gate voltage to obtain a certain threshold charge density. Due to its 3-D basis, the model inherently accounts for short-channel effects, such as the threshold voltage roll-off and the Drain Induced Barrier Lowering effect. A very good agreement with 3-D numerical simulations has been observed.
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Citations

El Hamid, H. A., Iniguez, B., Kilchytska, V., Flandre, D., & Ismail, Y. (2015). An analytical 3D model for short-channel effects in undoped FinFETs. Journal of Computational Electronics, 14(2), 500-505. https://doi.org/10.1007/s10825-015-0678-0 (Original work published 2015)