Formation of TiN/CoSi2 barrier layer on thin-film SOI for high-temperature applications
(1997) Conference HITEN 1997 — Location: Manchester (UK) (15.September.1997)
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Chen, J., Colinge, J.-P., Flandre, D., Nguyen, B.-Y., Hegde, R., & Rai, R. (1997). Formation of TiN/CoSi2 barrier layer on thin-film SOI for high-temperature applications. Proceedings of HITEN 1997, 159-164. https://hdl.handle.net/2078.5/253211