Fully CMOS compatible low-power microheater

Laconte, Jean;Dupont, C.;Akheyar, A.;Raskin, Jean-Pierre;Flandre, Denis
(2002) Design, Test, Integration, and Packaging of MEMS/MOEMS 2002 — Location: Cannes (France) (5.May.2002)

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An original design of a polysilicon loop-shaped microheater on a thin stacked dielectric membrane is presented. This design ensures high thermal uniformity and insulation (20,000 degrees C/W) and very low power consumption (20 mW for heating at 400 degrees C). Moreover, the use of CMOS-IC compatible TMAH-based bulk-micromachining techniques will allow an easy and low cost gas sensor integration.
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Laconte, J., Dupont, C., Akheyar, A., Raskin, J.-P., & Flandre, D. (2002). Fully CMOS compatible low-power microheater. Proceedings of SPIE - the International Society for Optical Engineering, 634-644.