SOI-CMOS technology for Thin Film Sensors on Membranes

Olbrechts, Benoît;Castadot, C.;Laconte, Jean;Flandre, Denis;Raskin, Jean-Pierre
(2005) 5th Round Table on Micro/Nano Technologies for Space (ESTEC 2005) — Location: Noordwijck (The Netherlands) (3.October.2005)

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Olbrechts, B., Castadot, C., Laconte, J., Flandre, D., & Raskin, J.-P. (2005). SOI-CMOS technology for Thin Film Sensors on Membranes. Proceedings of the 5th Round Table on Micro/Nano Technologies for Space (ESTEC 2005), 213-219. https://hdl.handle.net/2078.5/253163