On-wafer stress tuning of MEMS resonators
(2008) 19th MicroMechanics Europe Workshop - MME’08 — Location: Aachen (Germany) (28.September.2008)
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Houri, S., Francis, L., & Raskin, J.-P. (2008). On-wafer stress tuning of MEMS resonators. Proceedings of the 19th MicroMechanics Europe Workshop - MME’08, pp. 287-290. https://hdl.handle.net/2078.5/253155