A Tunable Palladium-Based Capacitive MEMS Hydrogen Sensor Performing High Dynamics, High Selectivity and Ultra-Low Power Sensing

Walewyns, Thomas;Spirito, David;Francis, Laurent
(2014) 2nd WINFAB Scientific Day — Location: Louvain-la-Neuve (Belgique) (17.October.2014)

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Walewyns, T., Spirito, D., & Francis, L. (2014). A Tunable Palladium-Based Capacitive MEMS Hydrogen Sensor Performing High Dynamics, High Selectivity and Ultra-Low Power Sensing. 2nd WINFAB Scientific Day, Louvain-la-Neuve (Belgique). https://hdl.handle.net/2078.5/253144