Ultra-Narrow, High Aspect Ratio Trenches for Use in Miniaturized Poly-Sige Accelerometers
(2013) 224th ECS Meeting — Location: San Francisco (USA) (27.October.2013)
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Ultra-NarrowHighAspectRatioTrenchesforUseinMiniaturizedPoly-SigeAccelerometers.pdf
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Ray Chaudhuri, A., Helin, P., Severi, S., Van Hoof, R., Du Bois, B., Tilmans, H., Francis, L., & Witvrouw, A. (2013). Ultra-Narrow, High Aspect Ratio Trenches for Use in Miniaturized Poly-Sige Accelerometers. 224th ECS Meeting, San Francisco (USA). https://hdl.handle.net/2078.5/253114