Fully CMOS-SOI Compatible Low-Power Directional Flow Sensor

Laconte, Jean;Rue, Bertrand;Raskin, Jean-Pierre;Flandre, Denis
(2004) Third IEEE International Conference on Sensors 2004 — Location: Vienna (Austria) (24.October.2004)

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The paper reports an improved low cost directional flow sensor, fully compatible with IC-CMOS SOI (silicon-on-insulator) processes, with fair sensitivity and short response time on a large airflow rate range (from 0 to 8 m/s) at a very low consumption (15 mW). Many different sensing principles can be found in the literature and impose a difficult choice between low power consumption, high airflow rate range, sufficient flow rate sensitivity and compatibility with IC processes. Our sensor challenges most recent realizations by providing attractive trade-offs between these parameters for a large range of applications.
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Laconte, J., Rue, B., Raskin, J.-P., & Flandre, D. (2004). Fully CMOS-SOI Compatible Low-Power Directional Flow Sensor. In IEEE, TU Vienna (ed.), Proceedings of the Third IEEE International Conference on Sensors 2004 (pp. 864-867). IEEE. https://doi.org/10.1109/ICSENS.2004.1426307